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EVG lithography machine/bonding machine


name Range of application
Single/double sided on lithography Main application: MEMS, advanced packaging, compound semiconductor, photoelectric device, photoelectric display, biochip micron and submicron graphics, especially on the edge of exposure, thick resist, debris, and special technology has obvious advantages.
reflectometer Application in the semiconductor substrate, a transparent substrate such as glass and metal base transparent/translucent membrane thickness measurement, the measurement of layers generally less than two layer
steps instrument/probe type contourgraph Used in semiconductor devices, MEMS, metal coating, paint coating, coating glass and solar etc;Mainly used for film thickness, stress, surface roughness and surface topography measurement
Atomic force microscopy Widely used in semiconductor, biology, data storage, food, chemistry, geology, energy, environment and other characterization in the field of measurement


Testing equipment


name Range of application
Elliptic partial instrument Used in semiconductor epitaxial layer (including compound materials), photoresist and metal transparent/translucent, single-layer/multi-layer, the gay/straight film film thickness, refractive index and extinction coefficient measurement
reflectometer Application in the semiconductor substrate, a transparent substrate such as glass and metal base transparent/translucent membrane thickness measurement, the measurement of layers generally less than two layer
steps instrument/probe type contourgraph Used in semiconductor devices, MEMS, metal coating, paint coating, coating glass and solar etc;Mainly used for film thickness, stress, surface roughness and surface topography measurement
Atomic force microscopy Widely used in semiconductor, biology, data storage, food, chemistry, geology, energy, environment and other characterization in the field of measurement
3d optical surface profiler Widely used in semiconductor materials and ceramic substrate surface roughness, MEMS devices are the key dimensions, TSV hole size and precision mechanical measurement, etc
Scanning electron microscopy It's widely used in microelectronics, semiconductor, chemistry, material science, fuel cells, environmental protection, medical health, biology, and other fields, nanoscale materials used in the two-dimensional surface morphology analysis and measurement, configurable spectrometer or pop instrument to achieve material qualitative/quantitative analysis of the surface composition

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